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Rihito KURODA and Shigetoshi SUGAWA (Tohoku University)

The video camera of the highest frame rate and the sensitivity in the world captures Dielectric breakdown of MOS capacitor and other phenomena invisible in the past

Title: A High Sensitivity 20Mfps CMOS Image Sensor with Readout speed of 1Tpixel/sec for Visualization of Ultra-high Speed Phenomena
Rihito Kuroda


Shigetoshi Sugawa
Author: Rihito Kuroda and Shigetoshi Sugawa
Affiliation: Graduate School of Engineering, Tohoku University, Japan
Email: rihito.kuroda.e3[at]tohoku.ac.jp
URL: http://www.sgw.most.tohoku.ac.jp/
Abstract:
Dielectric breakdown of MOS capacitor at 1Mfps.


Plasma light emission of magnetron sputtering equipment at 5Mfps

Ultra-high speed (UHS) CMOS image sensors with on-chop analog memories placed on the periphery of pixel array for the visualization of UHS phenomena are overviewed. The developed UHS CMOS image sensors consist of 400 X 250 effective pixels and 128 memories/pixel, and the readout speed of 1Tpixel/sec is obtained, leading to 10Mfps full resolution image capturing with consecutive 128 frames, and 20Mfps half resolution image capturing with consecutive 256 frames. The first development model was employed in the high speed video camera and put in practical use in 2012. By the development of dedicated process technologies, photosensitivity improvement and power consumption reduction were simultaneously achieved, and the performance improved version has been utilized in the commercialized high-speed video camera since 2015 that offers 10Mfps with ISO16,000 photosensitivity. Due to the improved photosensitivity, clear images can be captured and analyzed even under low light condition, such as under a microscope as well as capturing of UHS light emission phenomena.
Biographical Sketch: Rihito Kuroda received the B.S. degree in electronic engineering and the M.S. and Ph.D. degrees in management science and technology from Tohoku University, Sendai, Japan, in 2005, 2007, and 2010, respectively. He was a Research Fellow of the Japan Society for the Promotion of Science Research from 2007 to 2010. Since 2010, he is with the Graduate School of Engineering, Tohoku University, where he is currently an Associate Professor. He is engaged in researches on advanced CMOS image sensors and low noise devices technologies. Dr. Kuroda is a member of The Institute of Electrical and Electronics Engineers, The Institute of Electronics, Information and Communication Engineers and The Institute of Image Information and Television Engineers.

Shigetoshi Sugawa received the B.S. and M.S. degree in physics from the Tokyo Institute of Technology, Japan in 1982, and the Ph.D. degree in electrical engineering from Tohoku University, Japan in 1996. In 1982, he joined Canon Inc., where he has developed multi-points AF sensor and DSLR CMOS image sensor as a project leader. In 1999, he moved to Tohoku University, Japan, where he is currently a professor of the Graduate School of Engineering and New Industry Creation Hatchery Center, Tohoku University. His research interests are in the field of CMOS image sensors, photo-sensors, and semiconductor circuits and devices. He has authored and co-authored over 400 papers in international journals and conferences, and over 150 issued patents. He is a Fellow of The Institute of Image Information and Television Engineers.

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